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Simulation of Semiconductor Processes and Devices 2007: SISPAD 2007

Tibor Grasser ; Siegfried Selberherr (eds.)

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No detectada 2007 SpringerLink

Información

Tipo de recurso:

libros

ISBN impreso

978-3-211-72860-4

ISBN electrónico

978-3-211-72861-1

Editor responsable

Springer Nature

País de edición

Reino Unido

Fecha de publicación

Información sobre derechos de publicación

© Springer-Verlag Wien 2007

Cobertura temática

Tabla de contenidos

Hot-Carrier Behaviour of a 0.35 µm High-Voltage n-Channel LDMOS Transistor

J. M. Park; H. Enichlmair; R. Minixhofer

This paper describes the hot-carrier (HC) behaviour of a high-voltage 0.35 µm n-channel lateral DMOS transistor (LDMOSFET). Self-heating effects during HC stress have to be taken into account for the HC stress analysis. Peak I and I degradations were observed at the stress bias V = 0.8 V and V = 2.5 ∼ 3.0 V, respectively. Together with TCAD simulations and measurements, one can clearly explain the HC effects occurring near the bird’s beak region and show their impact on the I and I degradations.

Pp. 369-372

Charge Injection Model in Organic Light-Emitting Diodes Based on a Master Equation

Ling Li; Gregor Meller; Hans Kosina

A master equation model is developed for dark injection from a metallic electrode into a random hopping system, representing a conjugated polymer or a molecularly doped polymer. A master equation allows for the inclusion of the image force effect on the charge injection process and for a separate analysis of the forward hopping and back-flow components. This model yields the injection current as a function of electric field, temperature, energy barrier between metal and organic layer, and energetic width of the distribution of hopping sites. Good agreement with experimental data is found.

Pp. 377-380

Simulation of Analog/RF Performance and Process Variation in Nanowire Transistors

Runsheng Wang; Jing Zhuge; Ru Huang

In this work, the RF performance of Si nanowire transistors (SNWTs) is computationally investigated, including RF figures of merit, impacts of parasitic effects and nanowire cross-sectional shape fluctuation caused by process variation. The simulated results show superior RF scalability of SNWTs and severe impacts of parasitic capacitance and process fluctuations. The influence of gradient doping profile in source/drain extension region of SNWTs on RF application is also studied.

Pp. 381-384

Analysis of Process-Geometry Modulations through 3D TCAD

L. Sponton; L. Bomholt; W. Fichtner

In this work we present a study of the combined effects of the variation of process parameters and geometry in a 65 nm technology through consistent three-dimensional TCAD process and device simulations. Channel lengths and widths together with two critical process parameters obtained through a screening experiment are examined in a 3-level full-factorial design of experiments. The results show an increased impact of process variations for short and narrow structures.

Pp. 385-388

Asymmetrical Triple-Gate FET

Meng-Hsueh Chiang; Jeng-Nan Lin; Keunwoo Kim; Ching-Te Chuang

A novel triple-gate MOSFET structure with polysilicon gate process is proposed using asymmetrical (np) polysilicon gates. CMOS-compatible V’s for high-performance circuit applications can be achieved for both nFET and pFET. The superior subthreshold characteristics and device performance are analyzed by three-dimensional numerical simulations. Comparisons of device properties with the mid-gap metal gate are presented.

Pp. 389-392

Process Variation-A ware Estimation of Static Leakage Power in Nano CMOS

B. P. Harish; Navakanta Bhat; Mahesh B. Patil

We present a statistical methodology for leakage power estimation, due to subthreshold and gate tunneling leakage, in the presence of process variations, for 65 nm CMOS. The circuit leakage power variations is analyzed by Monte Carlo (MC) simulations, by characterizing NAND gate library. A statistical “hybrid model” is proposed, to extend this methodology to a generic library. We demonstrate that hybrid model based statistical design results in up to 95% improvement in the prediction of worst to best corner leakage spread, with an error of less than 0.5%, with respect to worst case design.

Pp. 393-396

The Optimization of Low Power Operation SRAM Circuit for 32nm Node

R. Tanabe; H. Anzai; Y. Ashizawa; H. Oka

As CMOS technology is advanced in recent years, the operation of SRAM becomes critical issue for further scaling. It is crucial for realizing the SRAM to keep static noise margin (SNM) and write margin (WM) large enough to get stability and overcome random dopant and process fluctuations. Also, suppression of leakage current is another key issue. The major sources of leakage current are the gate direct tunneling current, the sub-threshold leakage and the reverse biased band-to-band-tunneling junction leakage. To reduce total chip power, these leakage components must be suppressed.

In this paper, we have focused on the optimization of low power operation SRAM circuit for 32 nm node with TCAD optimizing the relationship among margin, leakage current and access time. To conduct the circuit design principle, we define the new quality factor and evaluate the 32nm SRAM performance with this defined formula.

Pp. 397-400

Device Design Evaluation of Multigate FETs Using Full 3D Process and Device TCAD Simulation

Muhammad Nawaz; Stefan Decker; Luis-Felipe Giles; Wolfgang Molzer; Thomas Schulz; Klaus Schrüfer; Reinhard Mahnkopf

Full 3D numerical process and device simulations have been performed in order to optimize device design of multigate FETs (MuGFETs) and the underlying fabrication processes. At first process simulation parameters have been calibrated to measurement data of pre-development process results. Based on this, device electrical performance has been assessed for different gate length, fin doping, implant conditions, fin height, fin width, gate oxide and box thickness by means of typical device parameters.

Pp. 401-404

Modeling and Extraction of Effective Lateral Doping Profile Using the Relation of On-Resistance vs. Overlap Capacitance in (100) and (110)-Oriented MOSFETs

Seong-Dong Kim; Bin (Frank) Yang; Shreesh Narasimha; Andrew Waite; Karen Nummy; Linda Black; Haizhou Yin; Scott Luning

A comprehensive technique for the accurate extraction of the effective lateral doping abruptness and the spreading resistance components is applied to both Si (100) and Si (110) MOSFETs. The spreading resistance components under extension-to-gate overlap and spacer regions are successfully correlated to the lateral extension (EXT) doping abruptness by the relationship between on-resistance (R) and overlap capacitance response (C). The lateral doping profile difference is extracted between (100) and (110) PMOS, which successfully explains higher external resistance in measured (110) PMOS.

Pp. 405-408

Molecular Orbital Examination of Negative-Bias Temperature Instability Mechanism

T. Maruizumi; J. Ushio; Y. Shiraki

To clarify the microscopic mechanism of Negative-Bias Temperature Instability (NBTI), which is one of serious reliability issues in CMOS technology, the transfer reaction of the positive fixed charge at the Si/SiO interface accompanied by hydrogen migration was investigated using the ab initio molecular orbital method. Comparing the activation energies, we determined the most likely reaction path. We found that the reaction path can be stabilized more by migration of an electrically neutral H atom from a Si substrate to a positively charged O atom than by migration of a proton from a Si substrate to an electrically neutral O atom. The calculated Mulliken atomic charges and atomic spin densities also supported our conclusion.

Pp. 409-412