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Palabras clave – provistas por la editorial

white light interference; laser interference; surface positioning; end-plate surface distance measurement; spherical diamond wheel; diamond roller; form truing; in-situ measurements; topography measurement; differential measurement system; modular design; confocal sensor; film interferometry; over-constrained mechanism; geometric deviations; multi-tasking machine tools; identification method; squareness of translational axes; metrology; step gauge; length calibration; multi-path laser synthesis technology; measurement mechanism; machine tool; surface shape contour; on-site measurement; positional relation; scanless 3D imaging; compressed sensing; depth detection; single-pixel detector; blade tip timing; circumferential Fourier fit; synchronous vibration; optical angle sensor; mode-locked femtosecond laser; optical frequency comb; laser autocollimation; diffraction grating; absolute angle measurement; nonlinear optics; second harmonic generation; aeroengine blade; blade twist; measurement and evaluation; a priori planning; geometric analysis; automated optical inspection; precision measurement; circular contour; edge detection; measurement system analysis; coordinate measuring machine; reproducibility; GD& T; quality; measurement uncertainty; precision metrology; form measurement; stitching linear-scan method; roundness measurement; Monte Carlo method; single point diamond tool; cutting edge radius; reversal method; nanoindentation system; elastic recovery; surface charge distribution; point probing characteristics; spherical scattering electrical field probe; miniature internal structures; high aspect ratios; circulating cooling water; dynamic thermal filtering; precision manufacturing; quick response; temperature stability; thermal management; dual-axis level; light refraction; light transmission; angle measurement; differential Fabry–Pérot interferometer; homodyne interferometer; nonlinearity error; linear displacement; chromatic confocal probe; femtosecond laser; off-axis differential method; tracking local minimum method; laser triangulation displacement sensor (LTDS); dispensing robot; location system; actual laser imaging waveform; centroid difference; repeatability accuracy; dynamic response speed; absolute distance measurement; system error correction; surface texture measurement; confocal sensing; surface form tracing; 3D reconstruction; roughness; in-process; metrology for machining; optical coherence tomography; wafer die; defect detection; generative adversarial network (GAN); you only look once version 3 (YOLOv3); pad dressing; dynamic measurement; CMP; pad uniformity; pad lifetime; n/a