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Design, simulation, fabrication and characterization of mass microsensors embeddable to an implantable microvalve for glaucoma treatment

Martín Ángel Zalazar Fabio Ariel Guarnieri Oscar De Sanctis Alberto Cardona Marcelo Javier Otero

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Resumen/Descripción – provisto por el repositorio digital
The main research of the Group of BioMEMS is the implantable microvalve for controlling the intraocular pressure in patients with glaucoma. Glaucoma is a disease that affects tens of millions of people around the world. The development of Micro ElectroMechanical Systems and the generation of new materials allow the development of implantable micro-devices with improved biocompatibility. The knowledge of biomolecules associated with the glaucoma pathology will increase the effectiveness of the implant. In this sense, a mass microsensor capable of sensing biomolecules is desirable; also the microsensor has to be capable of being integrated to the implantable microvalve. This thesis was focused on the design, simulation, fabrication and characterization of Micro ElectroMechanical Systems -based mass microsensors for the detection of biomolecules. It starts with a modeling and simulation chapter where different types of microsensors were developed by using piezoelectric resonators, and follows a fabrication and characterization chapter. Regarding the biocompatibility, Ultrananocrystalline diamond and Parylene were used as structural materials; as piezoelectric materials, quartz, polyvinylidene fluoride and Aluminium Nitride were used. The parameters of the resonators were extracted by using 3D Finite Element Method models and experimental results; values were adjusted to fit the simulated frequency response with the experimental one. Ultrananocrystalline diamond films used as substrate, yielded a highly oriented (002) Aluminium Nitride films even as thin as 80 nanometers; it exhibited a piezoelectric coefficient of about 5.3 picometer per volt, one of the highest demonstrated today.
Palabras clave – provistas por el repositorio digital

Micro electro mechanical systems; Quartz crystal microbalance; Finite element method; Numerical simulation; Resonador piezoeléctrico; Biosensor; Sistema microelectromecánico; Microbalanza de cristal de cuarzo; Método de elementos finitos; Simulación numérica; Piezoelectric resonator

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No requiere 2016 Biblioteca Virtual de la Universidad Nacional del Litoral (SNRD) acceso abierto

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Tipo de recurso:

tesis

Idiomas de la publicación

  • inglés

País de edición

Argentina

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