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Palabras clave – provistas por la editorial

reactive magnetron sputtering; transparent conductive oxide; electronic transport; doping efficiency; tin dioxide; Nanoimprint lithography; UV-NIL; reversal NIL; liquid transfer imprint lithography; hierarchical structures; optical micro- and nanostructures; ITO thin films; magnetron sputtering; low temperature deposition; oxygen flow; microstructure; optoelectronic properties; transparent heaters; titanium oxide films; filtered cathodic vacuum arc; rutile; optical coatings; spectrally selective absorber; multilayer stack; spectroscopic ellipsometry; optical constants; simulation