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Palabras clave – provistas por la editorial

vibrating ring gyroscope; n/a; tunnel magnetoresistive effect; optical sensor; micro-NIR spectrometer; pulse inertia force; gas sensor; wet etching; oil detection; glass welding; spring design; power consumption; MEMS (micro-electro-mechanical system); back cavity; deflection position detector; magnetic; MEMS; single-layer SiO2; frequency tuning; threshold accuracy; suspended micro hotplate; AlGaN/GaN circular HFETs; quadrature modulation signal; inertial switch; nanoparticle sensor; low noise; photonic crystal nanobeam cavity; floating slug; infrared image; backstepping approach; microdroplet; acceleration switch; microgyroscope; temperature uniformity; methane; microfluidic; accelerometer design; photonic crystal cavity; anisotropy; resonant frequency; dual-mass MEMS gyroscope; analytical model; single crystal silicon; temperature sensor; micro fluidic; refractive index sensor; microwave measurement; low zero-g offset; femtosecond laser; micropellistor; rapid fabrication; accelerometer; tracking performance; GaN diaphragm; microactuator; resistance parameter; optomechanical sensor; scanning grating mirror; GaAs MMIC; adaptive control; frequency split; frequency mismatch; electrostatic force feedback; thermoelectric power sensor; squeeze-film damping; silicon; wideband; Accelerometer readout; bonding strength; high temperature pressure sensors; 3D simulation; level-set method; tetramethylammonium hydroxide (TMAH)