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Palabras clave – provistas por la editorial

micromachining; n/a; capacitive micromachined ultrasonic transducer (CMUT); transducer; gold nanoparticles; cantilever waveguide; push-pull actuator; MEMS mirror; chemo-FET; ultrahigh frequency ultrasonic transducer; fluorescence; lead-free piezoelectric materials; acoustics; bioimaging; scanner; micro-optics; MEMS; microendoscopy; ego-motion estimation; rib waveguide; electromagnetically-driven; two-photon; Lissajous scanning; fabrication; microwave resonator; finite element simulation; noise figure; imaging; modelling; Si lens; microwave remote sensing; piezoelectric array; smart hydrogels; bio-FET; surface micromachining; tilted microcoil; near-field microwave; electrochemical sensors; potentiometric sensor; photoacoustic imaging; micromachined US transducer; electrostatic actuator; polyimide capillary; high frequency ultrasonic transducer; microring resonator; ultrasonic transducer; ultrasonic imaging; indoor navigation; optical scanner; scale ambiguity; bio-sensors; non-resonating scanner; wide-filed imaging; confocal; acoustic delay line; tight focus; miniaturized microscope; monocular camera; low noise amplifier (LNA); in vivo; capacitive; high spatial resolution; sensing; microelectromechanical systems (MEMS); needle-type; display; pseudo-resonant; MEMS actuators; microtechnology; metal oxide field-effect transistor; transduction techniques; MEMS scanning mirror; 3D Printing; photoacoustic; chemo-sensor; in vitro; wearable sensors